Optical Thin Film Thickness Measurement​

MST-100

In this application, the SPU module is used for optical thin film thickness measurement. It can measure film thicknesses above 1 µm. Open source software for this system is readily available on the Raspberry Pi platform, allowing easy integration into inspection systems for various applications.

Features

  • Simplified measurement
  • Python source code available
  • Compact size
  • Compatible with Linux platform (Raspberry Pi)
  • Real-time monitoring of interference patterns

Configuration Example

Specification

Principles

Interference spectra are utilized for measuring film thickness. 

A sample is exposed to white light, which produces a characteristic spectrum that is affected by the film thickness. By analyzing the interference spectra, the film’s thickness can be determined with accuracy.